Passive devices formed in grooves on a substrate and a...

Details Passive devices formed in grooves on a substrate and a... Passive devices formed in grooves on a substrate and a...

2007-10-23

2007-10-23

Lee, Benny (Department: 2817)

Wave transmission lines and networks

Long lines

Strip type

C257S664000

Reexamination Certificate

active

11122009

ABSTRACT:
A method for constructing passive devices on a substrate and a device is provided that is fabricated in accordance with the a method. The method includes the steps of: forming a plurality of grooves on a surface of the substrate by using an anisotropic etching procedure to enlarge a surface area of the substrate; forming an insulating layer at least in the plurality of grooves; and a structured metallization at least in the plurality of grooves for constructing the device above the insulating layer such that for a maximum integration density, the passive device is essentially constructed to extend through the plurality of grooves.

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patent: 0 391 123 (1990-10-01), None
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