Passive alignment of components with micromachined tool

Metal fusion bonding – Process – Plural joints

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228 62, 228 495, 29834, B23K 3704

Patent

active

059643978

ABSTRACT:
A method of fabricating an electronic device uses a micromachined tool that has openings which receive and align components with respect to each other and a substrate. The tool has fiducial marks which align to fiducial marks on the substrate, thereby producing precise alignment of the tool and the substrate. The components are then inserted into the openings, thereby insuring their alignment with respect to the substrate.

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patent: 4528747 (1985-07-01), Hoffman et al.
patent: 4565314 (1986-01-01), Scholz
patent: 4646435 (1987-03-01), Grassauer
patent: 4712721 (1987-12-01), Noel et al.
patent: 5656507 (1997-08-01), Welbourn et al.

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