Coating processes – With post-treatment of coating or coating material – Plural film forming coatings wherein one coating contains a...
Patent
1991-01-14
1992-05-19
Lusignan, Michael
Coating processes
With post-treatment of coating or coating material
Plural film forming coatings wherein one coating contains a...
357 8, 357 52, 427379, 427387, 4273882, 427409, 437235, 437243, B05D 302
Patent
active
051147548
ABSTRACT:
Disclosed is a process for passivating a metal surface in a metal/polyimide structure, such as a polyimide layer on a semiconductor substrate containing a pattern of metallization. The process invovles the formation of an intermediate layer of a silsesquioxane polymer between the polyimide layer and the substrate. The silsesquioxane layer passivates the metal, to inhibit interaction between the metal surface and the polyimide precursor material used in forming the polyimide, to provide a moisture-resistant and oxidation-resistant interface.
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Cronin John E.
Farrar, Sr. Paul A.
Linde Harold G.
Previti-Kelly Rosemary A.
International Business Machines - Corporation
Lusignan Michael
Sabo William D.
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