Passivation of group III-V surfaces

Details Passivation of group III-V surfaces Passivation of group III-V surfaces

1988-09-30

1989-10-03

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437225, 148 333, 148 334, H01L 2100, H01L 2102, H01L 21306, H01L 2131

Patent

active

048716928

ABSTRACT:
A method of passivating a Group III-V compound surface by exposing the surface to a compound A-B, wherein A is an element having a heat of oxide formation greater than the heats of oxide formation of Group III and V elements and B is an element: S, Se, Te or Po.

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