Passivation of gallium arsenide surfaces with sodium sulfide

Details Passivation of gallium arsenide surfaces with sodium sulfide Passivation of gallium arsenide surfaces with sodium sulfide

1987-03-04

1988-06-14

Morgenstern, Norman

Fishing, trapping, and vermin destroying

4273722, 4274301, 4274432, 428688, 428698, 428699, 437235, H01L 21302, B05D 512, B32B 900

Patent

active

047512008

ABSTRACT:
A method of passivating the surface of a gallium arsenide substrate by cleaning the gallium arsenide substrate in an etching solution and depositing a sulfide film on the substrate. The step of depositing the sulfide film is preferably performed by spin-on of a sodium sulfide solution, followed by drying or annealing. The resulting passivated surface exhibits superior surface recombination velocity characteristics compared to prior art passivation techniques, thereby making possible superior solid state device operating characteristics.

REFERENCES:
patent: 4320178 (1982-03-01), Chemla
patent: 4354198 (1982-10-01), Hodgson et al.
patent: 4632886 (1986-12-01), Teherani

Affiliated with

Also associated with

Rating

Passivation of gallium arsenide surfaces with sodium sulfide does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Passivation of gallium arsenide surfaces with sodium sulfide, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Passivation of gallium arsenide surfaces with sodium sulfide will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-505063