Passivation for micromechanical devices

Details Passivation for micromechanical devices Passivation for micromechanical devices

1999-09-27

2001-07-10

Epps, Georgia (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave directional modulation

C359S291000, C359S296000, C257S682000, C427S162000

Reexamination Certificate

active

06259551

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to protective coatings for microelectronic devices, more particularly to protective layers comprised of a monolayer.
2. Background of the Invention
Micromechanical devices typically comprise a device with moving parts manufactured with a size on the order of microns. Examples include gears, motors, moving mirrors and accelerometers. These moving parts sometimes come into contact with each other or with non-moving parts of the superstructure of the device.
Several techniques of lubrication and passivation are used to alleviate friction at these points of contact. The contact can cause physical damage to the parts, as well as sticking between the parts, preventing the devices from functioning as they are intended. Certain types of these devices, that contact other parts millions of times, have a problem with the lubricant or passivant desorbing from the surface. This leaves the surface unprotected and leads to damage.
Certain types of micromechanical devices are packaged with a passivant or lubricant contained in a hermetic package. The package must be hermetically sealed to prevent desorbed passivants from escaping the package. This allows the desorbed passivant to be replenished from within the package. These types of packages are expensive and require more complicated manufacturing processes.
Even without the package, however, the passivants or lubricants used in current practice desorb from the surfaces. A more stable passivant or lubricant is needed, preferably one that does not require a hermetic package.
SUMMARY OF THE INVENTION
One aspect of the invention is a passivation layer for a micromechanical device. The passivation layer is a monolayer of a material that is either capable of chemical cross-linking or extremely stable. Cross-linking makes the layer more stable and the passivant will not desorb from the surfaces being passivated.
Another aspect of the invention is that the use of a cross-linked or stable monolayer eliminates the need for a hermetically sealed package. Since the monolayer does not desorb from the surfaces, no containment is necessary, nor is there any need for replenishment.
It is an advantage of the invention in that the monolayer provides better protection for the surfaces of micromechanical devices.
It is a further advantage of the invention in that it eliminates the need for a hermetically sealed package, thereby reducing the complexity and cost of manufacturing.


REFERENCES:
patent: 4957993 (1990-09-01), Lee
patent: 5331454 (1994-07-01), Hornbeck
patent: 5411769 (1995-05-01), Hornbeck
patent: 5602671 (1997-02-01), Hornbeck
patent: 5610438 (1997-03-01), Wallace et al.

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