Passivated and low scatter acoustic wave devices and method ther

Details Passivated and low scatter acoustic wave devices and method ther Passivated and low scatter acoustic wave devices and method ther

1984-02-13

1987-08-11

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427100, B05D 512

Patent

active

046861114

ABSTRACT:
Passivated and low scatter acoustic wave devices comprise surface acoustic wave (SAW) and shallow bulk acoustic wave (SBAW) devices having transducers composed of oxidizable metal and layers of metal oxide on conventional acoustic wave substrates. Passivated transducers are achieved by forming a layer of oxide on an existing transducer. The method may be used to passivate a device packaged in a non-oxidizable package with oxidizable wire leads, thus combining complete protection with efficient manufacturing operations. Low scatter SAW transducers are achieved by forming the transducer and the interstitial insulating layer from a single layer of oxidizable metal by means of masking and oxidation operations.

REFERENCES:
patent: 3757733 (1973-09-01), Reinberg
patent: 4232239 (1980-11-01), Dworsky et al.
patent: 4433004 (1984-02-01), Yonezawa et al.
patent: 4436770 (1984-03-01), Nishizawa et al.

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