Coating processes – Direct application of electrical – magnetic – wave – or... – Ion plating or implantation
Patent
1994-10-04
1996-04-30
King, Roy V.
Coating processes
Direct application of electrical, magnetic, wave, or...
Ion plating or implantation
427533, 427553, 427249, 427122, 4272557, 427327, C23C 1412, B05D 306
Patent
active
055123309
ABSTRACT:
The present invention provides a new class of precursors for forming an improved diamond-like carbon coating on a workpiece. The precursors of the present invention are paraxylylenes, preferably dimers of paraxylylene, which are solid at room temperature and which will vaporize, pyrolize to substantially monomeric form, condense onto a workpiece, and spontaneously polymerize to form a "parylene" film which is free of precursor droplets and absorbed water. Upon bombardment with an ion beam, the parylene film is converted into a uniform, pinhole-free DLC coating.
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Roger Olson, Parylene, a Biostable Coating for Medical Applications, Specialty Coating Systems 1993, Union Carbide Co. pp. 1-5.
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