Partition-type heating apparatus

Details Partition-type heating apparatus Partition-type heating apparatus

2006-10-11

2011-10-04

Robinson, Daniel L (Department: 3742)

Electric heating

Heating devices

Resistive element: igniter type

C118S726000

Reexamination Certificate

active

08030597

ABSTRACT:
A partition-type heating apparatus has advantageous effects in that a material to be heated, i.e., a reaction gas used in a chemical vapor deposition (CVD) process, is pre-heated and the pre-heated reaction gas flows through a flow channel defined by the vertical and horizontal partitions so that the flowing reaction gas is heated by the transfer of heat generated from a hot wire during the flow of the reaction gas, thereby securing heating performance required for a small-sized heating apparatus.

REFERENCES:
patent: 3939798 (1976-02-01), Morton
patent: 5334250 (1994-08-01), Mikami et al.
patent: 5892201 (1999-04-01), Croucher et al.
patent: 2002/0067917 (2002-06-01), Takamatsu et al.
patent: 2007/0101940 (2007-05-01), Iizuka
patent: 2009/0127244 (2009-05-01), Russegger et al.
patent: 2009/0218331 (2009-09-01), Um

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