Particulate removal from an electrostatic chuck

Details Particulate removal from an electrostatic chuck Particulate removal from an electrostatic chuck

2006-08-29

2006-08-29

El-Arini, Zeinab (Department: 1746)

Cleaning and liquid contact with solids

Processes

Including use of vacuum, suction, or inert atmosphere

C134S030000, C134S034000, C134S037000, C134S042000, C015S300100, C015S301000, C015S303000, C015S306100, C015S309200, C015S345000, C015S346000, C156S345330

Reexamination Certificate

active

07097714

ABSTRACT:
The cleaning of particles from an electrostatic chuck. In one embodiment, a method of cleaning an electrostatic chuck in a processing chamber is disclosed. The method comprises directing a flow of gas across the electrostatic chuck to dislodge particles from the electrostatic chuck and removing the flow of gas and particles through an exhaust port in the processing chamber. In this embodiment, the vacuum integrity of the chamber is not compromised during the cleaning of the electrostatic chuck.

REFERENCES:
patent: 5507874 (1996-04-01), Su et al.
patent: 6170496 (2001-01-01), Chen et al.
patent: 6821350 (2004-11-01), Krogh
patent: 2002/0153024 (2002-10-01), Akiba

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