Particle trap for a plasma source

Details Particle trap for a plasma source Particle trap for a plasma source

2011-03-29

2011-03-29

Greene, Jason M (Department: 1775)

Gas separation: processes

With control responsive to sensed condition

Temperature sensed

C055S288000, C055S434000, C055S434300, C055S462000, C055SDIG015, C055S385100, C095S267000, C095S025000, C095S272000, C096S221000, C118S7230AN, C118S7230ER, C204S298070

Reexamination Certificate

active

07914603

ABSTRACT:
A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.

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