Particle source with selectable beam current and energy spread

Details Particle source with selectable beam current and energy spread Particle source with selectable beam current and energy spread

2006-04-25

2006-04-25

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With target means

C250S3960ML, C250S3960ML, C250S311000, C250S305000

Reexamination Certificate

active

07034315

ABSTRACT:
The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles13eccentrically through a lens6. As a result of this, energy dispersion will occur in an image15formed by the lens6. By projecting this image15onto a diaphragm7, it is possible to only allow particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam16will have a reduced energy spread. By adding a deflection unit10, this particle beam16can be deflected toward the optical axis2. One can also elect to deflect a beam12going through the middle of the lens6—and having, for example, greater current—toward the optical axis.

REFERENCES:
patent: 3622781 (1971-11-01), Liebl
patent: 5221844 (1993-06-01), van der Mast et al.
patent: 2003/0168606 (2003-09-01), Adamec et al.
S. Uhlemann and M. Haider, “Experimental Set-Up of a Fully Electrostatic Monochromator for a 200 kV TEM,” the proceedings of the 15th International Congress on Electron Microscopy, session 5/S14. held in Durban, South Africa, Sep. 1-6, 2002.
Gerd Benner, Erik Essers, Bernd Huber and Alexander Orchowski, “Design and First Results of SESAM,” LEO Elektronenmikroskople GmbH, Carl Zeiss S-M-T AG, D-73447 Oberkochen, Germany.
Erick Plies and Jan Bartle, “Proposal of a Novel Highly Symmetric Wlen Filter Monochromator,” Institut fur Angewandte Physik, Auf der Morgenstelle 10, D-72076 Tubingen, Germany.

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