Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1986-12-12
1989-04-11
Lacey, David L.
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
156643, 118723, 118 501, 118504, H01J 3700, C23C 1600
Patent
active
048203700
ABSTRACT:
The wafer processing boat of a plasma enhanced chemical vapor processor includes an R.F. connector at the inner end of its interleaved electrodes. The R.F. electrical connector includes slidably mated male and female portions for making R.F. electrical connection to the boat through the end wall of the evacuable furnace tube. A particle shield surrounds the mated male and female R.F. connector portions for confinement of particulates released during the mating of the connector. The shield includes an open end which faces downstream of the flow of processing gases to reduce backstreaming of particulates onto the wafers. The electrical male conductors of the connector are covered by a quartz sheath.
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patent: 3588789 (1971-06-01), Kailus
patent: 4223048 (1980-09-01), Engle, Jr.
patent: 4448149 (1984-05-01), Brown et al.
patent: 4508053 (1985-04-01), Eriksson
patent: 4625678 (1986-12-01), Shioya et al.
Aine Harry E.
Anderson Andrew J.
Lacey David L.
Pacific Western Systems Inc.
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