Particle sensor

Details Particle sensor Particle sensor

1997-08-15

1999-10-19

Patel, Harshad

Measuring and testing

Liquid analysis or analysis of the suspension of solids in a...

Content or effect of a constituent of a liquid mixture

7386121, 7386173, 310338, G01N 1506, G01F 166, G01F 130, H01L 4104

Patent

active

059692367

ABSTRACT:
A particle sensor includes, a sensor element including (a) a vibrating section having a mass that is sensitive to the collision of solid particles contained in a fluid with the vibrating section and (b) a detecting section for detecting the vibration of the vibrating section caused by the collision and converting the vibration to electric signals, a housing for fixing said sensor element, an inlet nozzle forming a fluid inlet, and an outlet nozzle forming a fluid outlet. In the particle sensor, the outlet nozzle is provided so that the sensor element is between the inlet nozzle and the outlet nozzle, throughholes are formed in the sensor element in at least part of the vicinity of the vibrating section, and the fluid entering the particle sensor from the inlet nozzle collides with the sensor element, passes through the throughholes and leaves the particle sensor from the outlet nozzle. The particle sensor has such a characteristic structure that the speed of a fluid colliding with the sensor element can be changed. The particle sensor can measure the sizes and particle size distribution of particles contained in a fluid, easily in a short time.

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