Particle remover, exposure apparatus having the same, and...

Details Particle remover, exposure apparatus having the same, and... Particle remover, exposure apparatus having the same, and...

2005-10-20

2008-08-19

Berman, Jack I. (Department: 2881)

Radiant energy

Electrically neutral molecular or atomic beam devices and...

C250S492200, C250S492230, C355S030000, C355S075000, C355S067000, C430S002000, C430S296000

Reexamination Certificate

active

07414240

ABSTRACT:
A particle remover includes an irradiation unit for irradiating plural lights onto a target from different directions, and for scanning the lights on the target, and a collector for collecting particles carried as a result of scanning of the lights.

REFERENCES:
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patent: 2006/0077361 (2006-04-01), Sogard
patent: 5-100182 (1993-04-01), None
Tam et al, “Laser-cleaning techniques for removal of surface particulates,” J. Appl. Phys. 71(7). pp. 3515-3523, Apr. 1, 1992.
Svoboda, et al, Optical trapping of metallic Raleigh particles;: Optical Letters, vol. 19, No. 13, pp. 930-932, Jul. 1, 1994.
Arthur Ashkin, “Optical trapping and manipulation of neural particles using lasers,” Proc. Natl. Acad. Sci. U.S.A., vol. 94 pp. 4853-4860 (1997).
Moors et al, “Electrostatic mask protection for extreme ultraviolet lithography”, Journal of Vacuum Science & Technology B, vol. 20, No. 1, pp. 316-320 (2002).
Rader et al, “Verification studies of thermophoretic protection of EUV masks,” Emerging Lithographic Technologies VI, SPIE Proceedings vol. 468 pp. 182-193, (2002).

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