Radiant energy – Ion generation – Field ionization type
Reexamination Certificate
2007-03-27
2007-03-27
Wells, Nikita (Department: 2881)
Radiant energy
Ion generation
Field ionization type
C250S426000, C250S427000, C250S493100, C250S3960ML, C313S363100, C315S111810, C315S111310, C315S111010
Reexamination Certificate
active
10829841
ABSTRACT:
This invention relates to an apparatus for processing particles. The apparatus comprises a particle source having an exist aperture; an extraction electrode located at the exist aperture; an acceleration electrode adjacent to the extraction electrode; a processing compartment adjacent to the acceleration electrode; and a deceleration electrode located adjacent to the processing compartment. The invention also relates to methods of processing particles and to particles processed by the apparatus and methods of the invention.
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Cabot Microelectronics Corporation
Hughes Blair
Omholt Thomas
Wells Nikita
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