Particle-optical systems and arrangements and...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

Reexamination Certificate

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C250S310000, C250S311000, C250S492220, C250S492300

Reexamination Certificate

active

07554094

ABSTRACT:
An electron-optical arrangement provides a primary beam path for a beam of primary electrons and a secondary beam path for secondary electrons. The electron-optical arrangement includes a magnet arrangement having first, second and third magnetic field regions. The first magnetic field region is traversed by the primary beam path and the secondary beam path. The second magnetic field region is arranged in the primary beam path upstream of the first magnetic field region and is not traversed by the secondary beam path. The first and second magnetic field regions deflect the primary beam path in substantially opposite directions. The third magnetic field region is arranged in the secondary beam path downstream of the first magnetic field region and is not traversed by the first beam path. The first and third magnetic field regions deflect the secondary beam path in a substantially same direction.

REFERENCES:
patent: 4419581 (1983-12-01), Nakagawa
patent: 5578822 (1996-11-01), Van Der Mast et al.
patent: 5808310 (1998-09-01), Yamashita et al.
patent: 5892224 (1999-04-01), Nakasuji
patent: 6040576 (2000-03-01), Benner
patent: 6252412 (2001-06-01), Talbot et al.
patent: 6891168 (2005-05-01), Knippelmeyer et al.
patent: 6903337 (2005-06-01), Kienzle et al.
patent: 6967328 (2005-11-01), Kienzle et al.
patent: 7109483 (2006-09-01), Nakasuji et al.
patent: 7244949 (2007-07-01), Knippelmeyer et al.
patent: 7335894 (2008-02-01), Frosien et al.
patent: 2002/0028399 (2002-03-01), Nakasuji et al.
patent: 2002/0033344 (2002-03-01), Mabuchi et al.
patent: 2002/0033449 (2002-03-01), Nakasuji et al.
patent: 2002/0036264 (2002-03-01), Nakasuji et al.
patent: 2002/0109090 (2002-08-01), Nakasuji et al.
patent: 2002/0130262 (2002-09-01), Nakasuji et al.
patent: 2002/0142496 (2002-10-01), Nakasuji et al.
patent: 2002/0148961 (2002-10-01), Nakasuji et al.
patent: 2003/0066961 (2003-04-01), Kienzle et al.
patent: 2003/0155509 (2003-08-01), Nakasuji et al.
patent: 2004/0065827 (2004-04-01), Kienzle et al.
patent: 2004/0113092 (2004-06-01), Knippelmeyer et al.
patent: 2006/0151711 (2006-07-01), Frosien et al.
patent: 2006/0226360 (2006-10-01), Frosien
patent: 2006/0289804 (2006-12-01), Knippelmeyer et al.
patent: 2008/0054184 (2008-03-01), Knippelmeyer et al.
patent: 2008/0099697 (2008-05-01), Watanabe et al.
patent: 2008/0121804 (2008-05-01), Nakasuji et al.
patent: 2008/0121810 (2008-05-01), Liu et al.
R. Fink et al., “SMART: a planned ultrahigh-resolution spectromicroscope for BESSY II,” Journal of Electron Spectroscopy and Related Phenomena 84 (1997), pp. 213-250.
H. Mueller et al., “A beam separator with small aberrations,” Journal of Electron Microscopy 48(3); 1999; pp. 191-204.
G.I. Winograd, “A Multi-Blanker for Parallel Electron Beam Lithography,” Ph.D. thesis, May 2001; pp. 1-141.
International Search Report issued in corresponding international application No. PCT/US2004/029079 mailed Apr. 4, 2007.

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