Particle-optical apparatus with a permanent-magnetic lens...

Details Particle-optical apparatus with a permanent-magnetic lens... Particle-optical apparatus with a permanent-magnetic lens...

2006-06-27

2006-06-27

Nguyen, Kiet T. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML, C250S398000, C250S310000

Reexamination Certificate

active

07067820

ABSTRACT:
Particle-optical apparatus are normally embodied with a magnetic or electrostatic lens so as to focus a beam1of charged particles onto a sample8. It is desirable to be able to use these apparatus at different beam energies. It is, however, undesirable that the focus position9of the beam, as a result hereof, should shift with respect to the sample8. Use of a permanent-magnetic material6in a magnetic lens has advantages as regards compact construction, but is normally avoided because it is not easily possible to adjust the lens power to match varying beam energies. The invention shows how it is possible to keep constant the focus position9, independent of the energy of the particles in the beam1, by combining a magnetic lens—that has been furnished with permanent-magnetic material—with an electrostatic lens. The electrostatic lens is embodied in that case as an accelerating lens.

REFERENCES:
patent: 4785176 (1988-11-01), Frosien et al.
patent: 4806766 (1989-02-01), Chisholm
patent: 5780859 (1998-07-01), Feuerbaum et al.
patent: 6057553 (2000-05-01), Khursheed et al.
patent: 6307312 (2001-10-01), Tanaka
patent: 6320194 (2001-11-01), Khursheed et al.
patent: 6410923 (2002-06-01), Crewe
patent: 6605805 (2003-08-01), Chen

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