Particle-optical apparatus, electron microscopy system and...

Details Particle-optical apparatus, electron microscopy system and... Particle-optical apparatus, electron microscopy system and...

2005-07-05

2005-07-05

Sugarman, Scott J. (Department: 2873)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S398000, C250S310000, C250S311000, C250S492200

Reexamination Certificate

active

06914249

ABSTRACT:
A particle-optical apparatus is provided for directing a beam of charged particles on an object plane or to image the object plane with the beam onto an image plane or intermediate image plane. The apparatus comprises a stack of lens assemblies which are disposed in beam direction at a fixed distances spaced apart from which other and are controllable for providing successively adjustable deflection fields for a beam traversing the stack. Each lens assembly provides at least one field source member for a magnetic or electric field. In particular, two rows of a plurality of field source members per lens assembly can be provided.

REFERENCES:
patent: 3717785 (1973-02-01), Guernet
patent: 4785176 (1988-11-01), Frosien et al.
patent: 4994336 (1991-02-01), Benecke et al.
patent: 6288401 (2001-09-01), Chang et al.
patent: 2001/0054690 (2001-12-01), Shimada et al.
patent: 2002/0054284 (2002-05-01), de Jager et al.
patent: 2003/0066961 (2003-04-01), Kienzle et al.
patent: 2004/0149925 (2004-08-01), Muller
patent: 2 102 608 (1971-07-01), None
patent: 101 31 931 (2003-01-01), None
patent: 101 36 190 (2003-02-01), None
patent: 101 61 680 (2003-06-01), None
patent: 1 182 684 (2002-02-01), None
patent: WO 03/015121 (2003-02-01), None
English language translation of DE 101 61 680 A1 (published Jun. 26, 2003).

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