Particle-optical apparatus comprising an electron source with a

Details Particle-optical apparatus comprising an electron source with a Particle-optical apparatus comprising an electron source with a

1995-10-03

1996-12-24

Anderson, Bruce C.

Radiant energy

Ion generation

Field ionization type

25044211, 313336, H01J 37073

Patent

active

055875866

ABSTRACT:
The source can be readily aligned and the energy spread of the emitted bean can be controlled to an arbitrarily small value by variation of the voltage. Since no high voltage is present within the emissive part of the electron source, a very compact electron source can be realized.

REFERENCES:
patent: 3665241 (1972-05-01), Spindt et al.
patent: 4427886 (1984-01-01), Martin et al.
patent: 4880975 (1989-11-01), Nishioka et al.
patent: 4954711 (1990-09-01), Fink et al.
patent: 5059804 (1991-10-01), Fink et al.
patent: 5300775 (1994-04-01), Van Der Mast

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