Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-07-05
2005-07-05
Lee, John R. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C335S210000, C335S217000
Reexamination Certificate
active
06914248
ABSTRACT:
A particle-optical apparatus is proposed as well as a method for operating the same. The particle-optical apparatus provides a magnetic field for deflecting charged particles of a beam of charged particles and comprises a body of a material with a permeability number around which a current conductor at least partially engages and a temperature-adjusting unit for adjusting a temperature of the magnetic-flux-carrying body substantially to a nominal temperature. A relative variation of the permeability number relative to a width of a temperature range is to be smaller than a limit value a, wherein a is preferably smaller than 3·10−3K−1. In particular, the nominal temperature is at an extremum of a temperature dependence of the permeability number. Preferably, such a particle-optical apparatus can be employed in a microscopy or a lithography apparatus.
REFERENCES:
patent: 4246128 (1981-01-01), Gallagher et al.
patent: 4376249 (1983-03-01), Pfeiffer et al.
patent: 4817706 (1989-04-01), Harumi et al.
patent: 5629526 (1997-05-01), Nakasuji
patent: 5738949 (1998-04-01), Schaner et al.
patent: 6011268 (2000-01-01), Nakasuji
patent: 6188071 (2001-02-01), Gordon et al.
patent: 6217789 (2001-04-01), Inoue et al.
patent: 6297634 (2001-10-01), Aoki
patent: 6566663 (2003-05-01), Kamijo et al.
patent: 2002/0084422 (2002-07-01), Kienzle et al.
patent: 2003/0066961 (2003-04-01), Kienzle et al.
patent: 100 44 199 (2002-06-01), None
patent: 0 461 366 (1991-12-01), None
patent: 64-017364 (1989-01-01), None
patent: 2001230190 (2001-08-01), None
patent: 2001307975 (2001-11-01), None
patent: 2002170761 (2002-06-01), None
X, Zhu et al., “Comprehensive Analysis of Electron Optical Design of SCALPEL-HT/Alpha”, Proc. SPIE, vol. 3997, pp. 170-183, Jul. 2000, Emerging Lithographic Technologies IV, Elizabeth A. Dobisz, Ed.
Eichi Goto et al., “MOL(moving objective lens)Formulation of deflective aberration free system,” OPTIK, vol. 48, No. 3, pp. 255-270 (1977), Wissenschaftliche Verlagsgesellschaft mbH, Stuttgart, Germany.
Carl Zeiss NTS GmbH
Johnston Phillip A
Jones Day
Lee John R.
LandOfFree
Particle-optical apparatus and method for operating the same does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Particle-optical apparatus and method for operating the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Particle-optical apparatus and method for operating the same will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3406324