Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-05-10
2005-05-10
Nguyen, Kiet T. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
Reexamination Certificate
active
06891168
ABSTRACT:
An apparatus and a method to manipulate at least one beam of charged particles are provided. The apparatus comprises two rows of field source members13which are disposed periodically at a distance from each other such that there exist planes of symmetry S, S′ with respect to which the field source members13are symmetrically disposed. The field has a component which is displaceable in the x-direction. To provide such field, a pattern of source strengths according to the formula F1(x)=Fm(x)+Fc(x) is applied to the field source members, wherein Fmis a component which is substantially independent of the displacement x0and Fcis a correction component which is dependent on x0.
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Peter Schmid et al., “Outline of a variable-axis lens with arbitrary shift of axis in one direction,” J. Vac. Sci. Technol. B, vol. 19, No. 6., Nov./Dec. 2001, pp 2555-2565, American Vacuum Society.
Carl Zeiss NTS GmbH
Day Jones
Nguyen Kiet T.
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