Particle monitoring device and processing apparatus...

Details Particle monitoring device and processing apparatus... Particle monitoring device and processing apparatus...

2007-01-30

2007-01-30

Nguyen, Tu T. (Department: 2877)

Optics: measuring and testing

By particle light scattering

With photocell detection

Reexamination Certificate

active

11082652

ABSTRACT:
A particle monitoring device includes a light source for emitting a measurement light; and a light projecting/receiving unit, connected to a depressurized vessel of a processing apparatus, for projecting the emitted measurement light into the depressurized vessel and receiving a scattered light from a particle floating in the depressurized vessel. The light projecting/receiving unit is disposed such that the scattered light is received substantially parallel to the measurement light. The particle monitoring device further includes a received light intensity detection unit. The received light intensity detection unit has a received light intensity detection unit for determining whether or not the detected intensity is greater than a predetermined value and an instruction unit for instructing the processing apparatus to start, continue or stop a processing operation of the processing apparatus depending on the determined result.

REFERENCES:
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patent: 5316983 (1994-05-01), Fujimori et al.
patent: 5861951 (1999-01-01), Uesugi et al.
patent: 6165312 (2000-12-01), Smith, Jr. et al.
patent: 10-10036 (1998-01-01), None
patent: 11-337472 (1999-12-01), None
patent: 10-2004-0070674 (2004-08-01), None

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