Particle monitor for throttled pumping systems

Details Particle monitor for throttled pumping systems Particle monitor for throttled pumping systems

1994-03-07

1996-07-09

Allen, Stephone

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356338, G01N 1506, G01N 2100

Patent

active

055347061

ABSTRACT:
A method for accomplishing particle monitoring above the throttle valve of a turbo pump provides a particle sensor which is built into the throttle valve in such a way that it is insensitive to local plasma glows. Furthermore, the particle sensor is placed such that a particle monitoring laser beam of the particle sensor is offset from the centerline of the pipe, so as to maximize exposure to process gas flow which is diverted to the periphery of the pipe by the position of a butterfly valve plate.

REFERENCES:
patent: Re33213 (1990-05-01), Borden et al.
patent: 4804853 (1989-02-01), Borden et al.
patent: 4942305 (1990-07-01), Sommer
patent: 5055698 (1991-10-01), Borden
patent: 5083865 (1992-01-01), Kinney et al.
patent: 5132548 (1992-07-01), Borden et al.
patent: 5247188 (1993-09-01), Borden
patent: 5266798 (1993-11-01), Borden et al.
patent: 5360980 (1994-11-01), Borden et al.
Article entitled "High-Vacuum Technology" by Marsbed H. Hablanian, Marcel Dekker; New York, 1990, pp. 235-237.

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