Particle monitor for loadlock soft pump lines

Details Particle monitor for loadlock soft pump lines Particle monitor for loadlock soft pump lines

1993-05-14

1995-04-18

Williams, Hezron E.

Measuring and testing

Gas analysis

Solid content of gas

G01N 3300

Patent

active

054068304

ABSTRACT:
An apparatus and a method provide a particle monitor mounted in an exhaust line of a loadlock chamber. The apparatus of the present invention comprises a particle monitor and a particle filter mounted down stream from the particle monitor away from the loadlock chamber. In one embodiment, the particle filter can be implemented by a wire-mesh screen, or a perforated stainless steel screen. The particle filter can be mounted in a centering ring of a standard vacuum connection which comprises two flanges, a centering ring, and an O-ring held together by a clamp.

REFERENCES:
patent: 4797054 (1989-01-01), Arii
patent: 5031674 (1991-07-01), Mack
patent: 5083865 (1992-01-01), Kinney et al.
patent: 5271264 (1993-12-01), Chanayem

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