Optics: measuring and testing – For size of particles
Patent
1997-04-28
1999-02-09
Kim, Robert
Optics: measuring and testing
For size of particles
356237, 356370, 356343, 25055939, 25055945, G01N 1502, G01N 2100, G01J 400
Patent
active
058701893
ABSTRACT:
A particle monitor includes a light source for transmitting a light into a space over a wafer in wafer processing equipment to irradiate particles floating above the wafer for causing a scattered light; a photo-detector for detecting the scattered light to generate output signals corresponding to the intensity of the scattered light; a signal intensity judgment device for receiving the output signals from the photo-detector and comparing the output signals with a predetermined reference value already set in the signal intensity judgment device so as to judge whether the intensity of the scattered light is higher or lower than the predetermined reference value; and a display for displaying the intensity of the scattered light and luminance and distribution in intensity thereof or displaying distributions in size and the number of particles.
REFERENCES:
patent: 3612688 (1971-10-01), Liskowitz
patent: 4804853 (1989-02-01), Borden et al.
patent: 5008558 (1991-04-01), Koshinaka et al.
patent: 5255089 (1993-10-01), Dybas et al.
patent: 5355212 (1994-10-01), Wells et al.
patent: 5659390 (1997-08-01), Danko
Ito Natsuko
Uesugi Fumihiko
Kim Robert
NEC Corporation
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