Particle measurement configuration and semiconductor wafer...

Details Particle measurement configuration and semiconductor wafer... Particle measurement configuration and semiconductor wafer...

2006-02-21

2006-02-21

Williams, Hezron (Department: 2856)

Measuring and testing

Gas analysis

Impurity

Reexamination Certificate

active

07000454

ABSTRACT:
A particle measurement configuration measures the particle concentration in a liquid or gaseous medium by way of a particle measuring instrument. In order to avoid erroneous measurements or damage to the particle measuring instrument, a measuring cell is provided which measures temperature or pressure or pH of the medium. A system controller shuts off a valve if threshold values are exceeded and it prevents the particle measuring instrument from being operated outside a predefined specification.

REFERENCES:
patent: 5138869 (1992-08-01), Tom
patent: 5583282 (1996-12-01), Tom
patent: 5810928 (1998-09-01), Harada et al.
patent: 6044689 (2000-04-01), Yoshida et al.
patent: 6172376 (2001-01-01), Xu et al.
patent: 6205842 (2001-03-01), Patashnick et al.
patent: 6314986 (2001-11-01), Zheng et al.
patent: 6386015 (2002-05-01), Rader et al.
patent: 2002/0096211 (2002-07-01), Zheng et al.
patent: 2003/0041969 (2003-03-01), Schneider et al.
patent: 2003/0197852 (2003-10-01), Johnson et al.
patent: 2004/0159399 (2004-08-01), Misra et al.
patent: 2 295 232 (1996-05-01), None
patent: 05306988 (1993-11-01), None
patent: 07198556 (1995-08-01), None

Affiliated with

Also associated with

Rating

Particle measurement configuration and semiconductor wafer... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Particle measurement configuration and semiconductor wafer..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Particle measurement configuration and semiconductor wafer... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3694683