Particle inspecting apparatus and method using fourier transform

Details Particle inspecting apparatus and method using fourier transform Particle inspecting apparatus and method using fourier transform

1996-02-01

1998-02-17

Allen, Stephone B.

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

25055945, 356 71, 356237, G01N 2188

Patent

active

057194050

ABSTRACT:
A particle inspecting apparatus capable of detecting only particles without depending on conditions such as a density, a configuration, etc. of an original pattern of an object to be inspected is provided. The apparatus includes a light irradiating device for irradiating the inspected object with a beam of light and a condensing optical system for condensing the beam from the inspected object. The apparatus also includes a light limiting device, disposed in the vicinity of a Fourier transform plane for the inspected object in the condensing optical system, for admitting a passage of the beam corresponding to only a part of a Fourier transform pattern of the beam from the inspected object, a relative position shiftable device for shifting relative positions of the Fourier transform pattern of the beam from the inspected object and the light limiting device and a detecting device for detecting the particle on the basis of the beam passing through the light limiting device.

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patent: 5172000 (1992-12-01), Scheff et al.
patent: 5264912 (1993-11-01), Vaught et al.

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