Particle-free dockable interface for integrated circuit processi

Details Particle-free dockable interface for integrated circuit processi Particle-free dockable interface for integrated circuit processi

1985-04-08

1986-10-14

Marcus, Stephen

Fluent material handling, with receiver or receiver coacting mea

Combined

141383, 220 205, 414217, B65B 104

Patent

active

046166831

ABSTRACT:
A particle-free dockable interface is disclosed for linking together two spaces each enclosing a clean air environment. The interface is composed of interlocking doors on each space which fit together to trap particles which have accumulated from the dirty ambient environment on the outer surfaces of the doors.

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patent: 4534389 (1985-08-01), Tullis

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