Particle filter for microelectromechanical systems

Details Particle filter for microelectromechanical systems Particle filter for microelectromechanical systems

2005-04-05

2005-04-05

Smith, Duane (Department: 1724)

Gas separation: apparatus

Electric field separation apparatus

Including gas flow distribution means

C096S069000, C096S072000, C055S385100, C055S385600, C055S442000, C055S484000, C055S522000, C055S524000, C055S529000, C216S002000, C216S011000, C216S013000, C216S041000, C216S056000, C428S641000, C427S058000

Reexamination Certificate

active

06875257

ABSTRACT:
A particle filter for microelectromechanical systems is provided that includes a particle trap formed on a substrate material. The particle trap includes an array of multidimensional geometric structures in an adjacent relationship. The geometric structures further define a plurality of multidimensional voids therebetween for trapping particles therein. The individual multidimensional geometric structures are formed by a plurality of vertically interconnected geometric shapes to define different configurations of voids between the adjacent geometric structures. In one embodiment of the filter system, an electrical bias is applied to the array of multidimensional geometric structures to facilitate attracting and trapping of particles in the filter.

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patent: 6187412 (2001-02-01), Armacost et al.
patent: 6524488 (2003-02-01), Insley et al.

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