Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2006-05-11
2008-08-26
Vanore, David A (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S399000, C250S299000, C250S370110, C250S390110, C250S207000, C250S208200, C250S227110, C250S227320, C250S570000, C313S1030CM, C313S1030CM, C313S1050CM, C313S104000, C313S535000, C313S532000, C313S528000, C313S527000, C313S525000
Reexamination Certificate
active
07417235
ABSTRACT:
A multi-purpose efficient charge particle detector that by switching bias voltages measures either secondary ions, or secondary electrons (SE) from a sample, or secondary electrons that originate from back scattered electrons (SE3), is described. The basic version of the detector structure and two stripped down versions enable its use for the following detection combinations: The major version is for measuring secondary ions, or secondary electrons from the sample, or secondary electrons due to back-scattered electrons that hit parts other than the sample together or without secondary electrons from the sample. Measuring secondary ions or secondary electrons from the sample (no SE3). Measuring secondary electrons from the sample and/or secondary electrons resulting from back-scattered electrons hitting objects other than the sample (no ions).
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Cheifetz Eli
Schon Armin
Shofman Semyon
Bacon & Thomas PLLC
El-Mul Technologies Ltd.
Souw Bernard
Vanore David A
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