Particle detector for flowing liquids with the ability to distin

Details Particle detector for flowing liquids with the ability to distin Particle detector for flowing liquids with the ability to distin

1987-02-10

1988-11-08

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356341, 250575, G01N 1507

Patent

active

047835990

ABSTRACT:
A system for detecting contaminant particles in a liquid, such as used for processing wafers during the manufacture of integrated circuits, distinguishes non-contaminant bubbles generally found in liquids from contaminant particles. The system provides a controlled laminar fluid flow of the liquid through a pipe, and the substantially spherical bubbles in the flow path are detected by symmetrically spaced photodiodes. The irregularly shaped contaminant particles are detected, whereas the presence of bubbles are negated by the detection system by virtue of the balanced photodiode assembly.

REFERENCES:
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patent: 3797937 (1974-03-01), Shofner
patent: 4078863 (1978-03-01), Eriksson et al.
patent: 4188121 (1980-02-01), Hirleman, Jr. et al.
patent: 4193692 (1980-03-01), Wynn
patent: 4507556 (1985-03-01), Brenholdt
patent: 4595291 (1986-06-01), Tatsuno

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