Particle detection sensor, method for manufacturing particle...

Details Particle detection sensor, method for manufacturing particle... Particle detection sensor, method for manufacturing particle...

2006-08-25

2009-11-03

Rogers, David A. (Department: 2856)

Measuring and testing

Gas analysis

Detector detail

C073S023330, C073S028010, C073S028050, C073S031010, C073S031020, C073S031030

Reexamination Certificate

active

07610794

ABSTRACT:
A compact sensor with which particles floating in the air can be easily detected. A sensor having a microstructure which detects a detection object by contact is used. A microstructure has an opening to be a detection hole corresponding to the size of a detection object, and a pair of electrodes having a bridge structure are provided thereabove or thereunder so as to partially contact with each other.

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