Optics: measuring and testing – By particle light scattering
Reexamination Certificate
2008-04-01
2008-04-01
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
By particle light scattering
C356S335000, C356S338000
Reexamination Certificate
active
11289688
ABSTRACT:
A particle detecting method which is capable of detecting the number of low-speed particles accurately, and a storage medium storing a program for implementing the method. Intensity of scattered light generated when a light emitted into a gas stream is scattered by a particle is measured using a light receiving sensor at predetermined time intervals. A measuring time period for measuring the scattered light intensity is divided into measurement periods each defined as a predetermined time period, and a measured time point in each measurement period is selected at which a maximum value of the scattered light intensity measured is measured. The number of particles having passed by in front of the light receiving sensor is counted based on the measured time point selected in each measurement period.
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Isozaki Hisashi
Kakinuma Takashi
Nishioka Noritaka
Noda Akira
Saito Susumu
Kabushiki Kaisha TOPCON
Lauchman Layla G.
Tokyo Electron Limited
Underwood Jarreas
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