Particle beam testing method with countervoltage or retarding vo

Details Particle beam testing method with countervoltage or retarding vo Particle beam testing method with countervoltage or retarding vo

1992-09-21

1994-11-29

Arana, Louis

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 731, 250310, 250311, G01R 104

Patent

active

053693590

ABSTRACT:
A particle beam testing method wherein with the assistance of at least one adjustment voltage, an actual specimen voltage boost is produced at a measuring point of a specimen and wherein a reference specimen voltage boost for the measuring point is supplied to a retarding field, and as a result, the actual specimen voltage boost corresponds to the reference specimen voltage boost of the measuring point and, thus, a detector current remains constant so long as the specimen is fault-free.

REFERENCES:
patent: 4554455 (1985-11-01), Todokoro et al.
patent: 4629889 (1986-12-01), Todokoro et al.
patent: 4712057 (1987-12-01), Pau
patent: 4912052 (1990-03-01), Miyoshi et al.
patent: 5030908 (1991-07-01), Miyoshi et al.
Proceedings of SPIE, International Society of Optical Engineering, Mar. 11-12, 1986, Santa Clara, U.S.A., vol. 632, pp. 232-236.
"An Open-Loop Spectrocopy for Quantitative Waveform Measurements with the Scanning Electron Microscope", J. Phys. E. Sci. Instrum., vol. 18; 1985, printed in Great Britain, pp. 284-285.

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