Particle beam system with dynamic focusing

Details Particle beam system with dynamic focusing Particle beam system with dynamic focusing

1999-04-13

2000-10-10

Nguyen, Kiet T.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

25049223, H01J 37147

Patent

active

061304328

ABSTRACT:
A magnetic lens having a lens bore for the passage of a particle beam includes a dynamic focus coil that is positioned outside the lens bore and within the pole piece that shapes the lens field, so that the magnetic flux lines from the dynamic focus coil all end on the pole pieces of the lens and the shape of the lens field between the pole pieces has its magnitude changed by the current passing through the dynamic focus coil, but the field shape is not changed, thus changing the focal plane of the beam without moving the beam transversely with respect to the system axis.

REFERENCES:
patent: 4544846 (1985-10-01), Langher et al.
patent: 4977324 (1990-12-01), Kruit et al.

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