Particle beam processing system

Details Particle beam processing system Particle beam processing system

2005-01-04

2005-01-04

Lee, John R. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S294000, C250S298000, C250S307000

Reexamination Certificate

active

06838676

ABSTRACT:
A method for slowing and controlling a beam of charged particles includes the steps of superimposing at least one magnetic field on a mass and passing the beam through the mass and at least one magnetic field such that the beam and the mass slows but does not stop the particles. An apparatus for slowing and controlling a beam of charged particles includes a bending magnetic field superimposed on a focusing magnetic field within a mass.

REFERENCES:
patent: 5440133 (1995-08-01), Moyers et al.
patent: 6433336 (2002-08-01), Jongen et al.
patent: 20040056212 (2004-03-01), Yanagisawa et al.
patent: 2001-000562 (2001-01-01), None

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