Particle beam measuring method for non-contact testing of interc

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Using radiant energy

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324537, 324158R, G01R 3100

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active

049856812

ABSTRACT:
For testing an interconnect network for shorts and interruptions, a point of the network to be tested is charged with a particle beam. Subsequently, a potential at least one further contact point is read with the same particle beam and an unaltered primary energy. An identification of potential occurs by documenting the secondary electrons triggered at the contact points. In order to avoid a disturbing change of potential during the measuring phase, the measuring time is only a fraction of the time for charging the network.

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