Particle beam imaging system having hollow beam illumination

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

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250398, 2504922, H01J 3709

Patent

active

058215425

ABSTRACT:
An charged particle beam imaging system reduces aberrations affecting resolution at the workpiece where the aberrations are caused by interactions between the charged particles in the beam. The average distance between the particles at a crossover image in the illumination subsystem is increased by positioning an annular aperture at the crossover image.

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