Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1996-06-26
1998-10-13
Nguyen, Kiet T.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250398, 2504922, H01J 3709
Patent
active
058215425
ABSTRACT:
An charged particle beam imaging system reduces aberrations affecting resolution at the workpiece where the aberrations are caused by interactions between the charged particles in the beam. The average distance between the particles at a crossover image in the illumination subsystem is increased by positioning an annular aperture at the crossover image.
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International Business Machines - Corporation
Murray Susan M.
Nguyen Kiet T.
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