Particle beam generator

Details Particle beam generator Particle beam generator

2006-09-19

2006-09-19

Berman, Jack (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S306000, C250S307000, C250S310000, C250S397000, C313S251000, C313S292000

Reexamination Certificate

active

07109493

ABSTRACT:
The source of electrons is a nanotip in a vacuum as used in near field microscopy. The source of ions is a similar nanotip in vacuum supplied with liquid metal (gallium) as in a liquid-metal ion source. Electrons or ions from this nanometre-sized tip are extracted by centralising the tip over an aperture plate and applying a suitable voltage to the tip. The electrons (ions) pass through this plate and are accelerated up to several keV using a nanoscale/microscale accelerating column before being focussed using further microscale (or nanoscale) cylindrical lenses. The final element is an aberration corrected miniature (or sub-miniature) einzel lens which can focus the beam at several millimetres from the end of the instrument.

REFERENCES:
patent: 6023060 (2000-02-01), Chang et al.
patent: 6281508 (2001-08-01), Lee et al.
patent: 6369385 (2002-04-01), Muray et al.
patent: 2001/0010357 (2001-08-01), Ose et al.
patent: 2003/0127595 (2003-07-01), Nakamura et al.
patent: 2004/0169141 (2004-09-01), Adamec et al.

Affiliated with

Also associated with

Rating

Particle beam generator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Particle beam generator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Particle beam generator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3536386