Particle-beam exposure apparatus and particle-beam...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

Reexamination Certificate

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C250S3960ML

Reexamination Certificate

active

07932501

ABSTRACT:
A particle-beam exposure apparatus and a particle-beam therapeutic apparatus are obtained, in which, by reducing diameter increase, due to scattering in a range shifter, of a charged particle beam, the charged particle beam whose diameter is so narrow that spatially accurate exposure into the target is possible can be supplied, as well as, by placing the range shifter at a position apart from a patient, intimidation caused by a movement noise, etc. can be prevented. A particle-beam exposure apparatus and a particle-beam therapeutic apparatus include a range shifter4for varying energy of a charged particle beam with a thickness of the range shifter4being changed during exposure of the charged particle beam, so that a range of the charged particle beam at a target5to be exposed is set to a desired value; and a set of quadrupole magnets6, being placed between the range shifter4and the target5, based on the magnetization amount of the set of quadrupole magnets6being controlled corresponding to the charged-particle-beam energy varied by the range shifter4, for reducing diameter increase, due to scattering at the range shifter4, of the charged particle beam at the target5.

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