Particle beam apparatus with zones of different pressure

Details Particle beam apparatus with zones of different pressure Particle beam apparatus with zones of different pressure

1976-03-24

1978-01-03

Borchelt, Archie R.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250311, 250441, 250457, H01J 3726

Patent

active

040669050

ABSTRACT:
An improved particle beam optical apparatus of the type having an evacuated housing with two sequential zones along the beam axis to be maintained at different low absolute pressures. A pressure stage detachably mounted in the housing between the zones is divided by an apertured partition into two portions communicating with the respective zones. From each portion a conduit leads through the body of the pressure stage for connection to respective vacuum pumps, the centerlines of the conduits lying in a common plane perpendicular to the beam axis. The body of the pressure stage preferably is adjustably mounted in a rigid support ring that is attached in vaccum-tight relation to the housing. The arrangement simplifies the vacuum connections, minimizes distortion of the housing and misalignment of the beam generating and control elements, and provides adjustment capability of the partition aperture.

REFERENCES:
patent: 2253542 (1941-08-01), Von Ardenne
patent: 2991362 (1961-07-01), Schumacher
patent: 3363098 (1968-01-01), Wegmann
patent: 3809899 (1974-05-01), Baker et al.

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