Particle arrangement apparatus and particle arrangement method

Coating processes – Solid particles or fibers applied – Localized different areas produced

Reexamination Certificate

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Details

C427S198000, C427S256000, C427S273000, C427S430100, C118S407000, C118S409000, C118S416000

Reexamination Certificate

active

07635500

ABSTRACT:
A particle arrangement apparatus of the present invention includes a tank for holding a dispersion of particles, a rotating means for rotating the substrate inside the tank to dip the substrate into the dispersion and to remove the substrate from the dispersion, and a coating means for applying a liquid different from the dispersion to the surface of the substrate when the substrate is not in contact with the dispersion.

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Wang, et al., “Germanium nanowire field-effect transistors with SiO2and high-kHfO2gate dielectrics”, Applied Physics Letters, Sep. 22, 2003, pp. 2432-2434, vol. 83 No. 12, American Institute of Physics.

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