Particle-accelerating electrode

Details Particle-accelerating electrode Particle-accelerating electrode

1985-01-31

1987-03-17

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

3133631, G21K 108, H01J 314, H01J 326

Patent

active

046510036

ABSTRACT:
A particle-accelerating electrode designed as a Faraday cage and having positioned therein a blanking system for blanking a particle beam. With the electrode disclosed, the problem of providing a vacuum seal in a particle-optical column is solved in simple fashion without the particle-optical column having to be lengthened. A structure for vacuum sealing is provided in a beam path of the electrode as part of the particle-accelerating electrode.

REFERENCES:
patent: 2266218 (1941-12-01), Krause
patent: 2292087 (1942-08-01), Ramo
patent: 4169229 (1979-09-01), Feuerbaum
patent: 4413181 (1983-11-01), Feuerbaum
patent: 4467205 (1984-08-01), Beisswenger et al.
patent: 4508967 (1985-04-01), Boissel et al.

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