Partial pressure measuring method and partial pressure...

Details Partial pressure measuring method and partial pressure... Partial pressure measuring method and partial pressure...

2008-04-16

2010-10-19

Caputo, Lisa M (Department: 2855)

Measuring and testing

Fluid pressure gauge

Photoelectric

C216S060000

Reexamination Certificate

active

07814796

ABSTRACT:
Provided is a partial pressure measuring method and a partial pressure measuring apparatus by which a partial pressure distribution is easily measured in a vacuum chamber. The partial pressure measuring method and the partial pressure measuring apparatus includes: moving a local plasma source dedicated to partial pressure measuring provided in the vacuum chamber, to a location at which the measuring is to be performed; and measuring a partial pressure distribution in the vacuum chamber, by receiving emission of plasma generated by the local plasma source through a window which is formed in a wall part of the vacuum chamber and through which the emission passes, and thereby performing emission spectral analysis on intensity of the emission.

REFERENCES:
patent: 4243506 (1981-01-01), Ikeda et al.
patent: 4394237 (1983-07-01), Donnelly et al.
patent: 5290383 (1994-03-01), Koshimizu
patent: 5464667 (1995-11-01), Kohler et al.
patent: 5863339 (1999-01-01), Usami
patent: 5871658 (1999-02-01), Tao et al.
patent: 5980767 (1999-11-01), Koshimizu et al.
patent: 5998931 (1999-12-01), Donohoe
patent: 6117348 (2000-09-01), Peng et al.
patent: 6908529 (2005-06-01), Yamamoto et al.
patent: 7022937 (2006-04-01), Okumura et al.
patent: 58-46640 (1983-03-01), None
patent: 2-25249 (1990-06-01), None
patent: 5-62944 (1993-03-01), None
patent: 5-315095 (1993-11-01), None
patent: 11-236666 (1999-08-01), None
patent: 2005-276618 (2005-10-01), None
patent: 2006-313847 (2006-11-01), None

Affiliated with

Also associated with

Rating

Partial pressure measuring method and partial pressure... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Partial pressure measuring method and partial pressure..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Partial pressure measuring method and partial pressure... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4212909