Parameter extraction apparatus using MISFET devices of different

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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G01R 104

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active

054932386

ABSTRACT:
In a device parameter extracting apparatus, a set of drain currents I.sub.D (i,j) is measured from each of a plurality of MISFET devices of different gate lengths L(i) by successively applying gate voltages V.sub.G (i,j) to each of the MISFET devices for a predetermined drain voltage, where i identifies each of the MISFET devices and j is an integer. A set of drain currents I.sub.D (i,k) is interpolated from the measured drain currents I.sub.D (i,j) such that the interpolated drain currents correspond respectively to predetermined ones of voltage differences V.sub.G (i,j)-V.sub.TH (i), where k is an integer and V.sub.TH (i) is a threshold voltage of each of the MISFET devices. A set of regression lines R(k)=a(k)L(i)+b(k) is derived in a coordinate space from a set of relationships between V(k)/I.sub.D (i,k) and the gate lengths L(i) of the devices, where a(k) and b(k) are constants, where V(k) represents the predetermined ones of voltage differences. From the constants a(k) and b(k) is derived a coordinate point of the space which corresponds to an intersection of the regression lines.

REFERENCES:
patent: 5233291 (1993-08-01), Kouno et al.

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