Parameter adjuster

Details Parameter adjuster Parameter adjuster

2004-07-15

2009-08-25

Vincent, David R (Department: 2129)

Data processing: artificial intelligence

Machine learning

Genetic algorithm and genetic programming system

C700S265000, C703S008000

Reexamination Certificate

active

07580904

ABSTRACT:
A chromosome using each of a plurality of parameters of a physical model of a semiconductor element as a gene is defined and the parameters are optimized using a genetic algorithm based on the characteristics measurement data of the semiconductor element fabricated by way of trial. In the selection processing of the genetic algorithm, a sum of a first evaluation value based on linear scale data and a second evaluation value based on logarithmic scale data is employed as the evaluation value of the chromosome.

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