Parallelism adjusting mechanism of probe card

Details Parallelism adjusting mechanism of probe card Parallelism adjusting mechanism of probe card

2007-07-26

2011-11-01

Phan, Huy Q (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

08049525

ABSTRACT:
A parallelism adjusting mechanism of a probe card is provided. The parallelism adjusting mechanism can bring probes held by a probe card into uniform contact with a wafer even if a parallelism between a mounting reference surface for the probe card and the wafer as a test object is lost. To achieve this purpose, specifically, to adjust a parallelism of a probe card (101) that holds a plurality of probes (1) for electrically connecting a wafer (31) as a test object and a circuitry for generating a signal for a test with respect to the wafer (31), adjusting screws (22) as at least part of an inclination changing unit are provided. The inclination changing unit changes a degree of inclination of the probe card (101) with respect to a mounting reference surface (S1) of a prober (202) for mounting the probe card (101) thereon.

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International Search Report mailed Oct. 23, 2007, issued on PCT/JP2007/064703.
Taiwanese Office Action 096127945 dated Jan. 24, 2011.

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