Parallel-moving apparatus and lens moving device in an exposing

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355 55, 355 75, 355 76, G03B 2742

Patent

active

053769880

ABSTRACT:
A parallel-moving apparatus includes a fixed table with a static pressure bearing pad, and a movable table with an inclined static pressure bearing pad. A driving plate having a wedge-shaped cross-section is disposed between the fixed table and the movable table, and both surfaces thereof are parallel to the static pressure bearing pad of the movable table and the static pressure bearing pad of the fixed table, and are noncontact-supported thereby. When the driving plate is moved by an actuator, the movable table is moved toward or away from the fixed table while keeping its parallelism to the fixed table.

REFERENCES:
patent: 4588288 (1986-05-01), Nakasugi et al.
patent: 5228358 (1993-07-01), Sakino et al.

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