Parallel light moving type exposure apparatus

Details Parallel light moving type exposure apparatus Parallel light moving type exposure apparatus

1986-08-08

1987-11-17

Yeung, James C.

Illumination

Light source and modifier

Including reflector

362304, 34 1, F21V 700

Patent

active

047077735

ABSTRACT:
A parallel light moving type exposure apparatus including a light source adapted to cause parallel lights to be obtained by the lights reflected from a parabolic reflector, said light source and a material to be exposed being moved relative to each other to perform the exposure, comprises a first light-shielding member and a second light-shielding member. The former is intended to be used for preventing the lights from the light source from being directly irradiated onto the material to be exposed. The latter is intended to be used for making uniform the cumulated amounts of lights on points of the material to be exposed.

REFERENCES:
patent: 2198014 (1940-04-01), Ott

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